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Canatu Delivers S-100 Reactor to Semiconductor Leader

The S-100 reactor is designed for producing high-precision CNT pellicle membranes.

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By: DAVID SAVASTANO

Contributing Editor, Coatings World and Ink World, Coatings World and Ink World Magazine

Canatu has successfully delivered its second S-100 reactor to a major global semiconductor customer. The S-100 reactor, designed for producing high-precision CNT pellicle membranes, was shipped out of Vantaa this week.

The delivery includes the S-100 reactor, a limited license for Canatu’s patented technology, and a continuous supply of consumables to ensure an optimized, high-quality production process.

CNT pellicle membranes are a key enabling technology for extreme ultraviolet (EUV) lithography, the technology used to produce the most advanced sub-7nm chips. These pellicles protect photomasks from particle contamination during chip production.

With the next generation of EUV lithography machines operating at power levels exceeding 500W and dealing with higher heat loads, CNT pellicle membranes offer better performance compared to traditional composite pellicles. They provide higher EUV transmittance, better heat resistance, and enhanced mechanical strength, supporting productivity increase potential in EUV lithography process by up to 7-15%.

This reactor sale, agreed upon in 2023, is part of Canatu’s strategic plan outlined in its company description. In September, Canatu announced the delivery of its first S-100 reactor to another semiconductor customer.

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